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Acton VM Series Vacuum
Monochromators
The Acton VM Series vacuum monochromators
from Princeton Instruments offers the highest quality
instrumentation available for evacuated operation in
the wavelength range below 200nm. Our vacuum monochromators
range between 0.2 meters to 1 meter focal lengths and
include high-performance Acton Optics coatings, such
as the ARC #1200 Al+MgF2 with the highest reflectance
available in the industry at 120nm.
These state-of-the-art vacuum monochromators can
also be provided for nitrogen purge operation. The Acton
VM Series can be integrated into your current system
utilized with PI's complete line of accessories, X-Ray
cameras, and light sources. Single entrance/exit or
multi-port configurations are standard with single or
multiple grating options. See the Acton VM Series data
sheet for a full list of available gratings for your
specific model of interest .
Features and Benefits
- High efficiency optical coatings provide 80%
reflectance at 200nm
- Internally welded construction creates a high
vacuum environment with no areas for trapped contamination
- Triple grating turret (VM-504 only) permits
grating changes while under vacuum conditions
- Snap-in, kinematic gratings (VM-502) allow easy
grating changes
- Applications
- Plasma Diagnostics
- EUV Lithography
- Transmission/Reflection/Absorption spectroscopy
- Light Source Research
Acton VM Series - Vacuum
Monochromator Datasheets
| Model |
Focal Length |
Aperture Ratio |
Spectral Resolution** |
Dispersion* |
| VM-502 |
200mm |
f/4.5 |
0.12 nm |
4.0 nm/mm |
| VM-504 |
390mm |
f/5.4 |
0.06 nm |
2.1 nm/mm |
*with 1200g/mm grating @
435.8nm, 20 micron pixel size | **with 1200g/mm grating @ 435.8nm, 10 micron
slit size
Download Princeton Instruments 52-page Spectroscopy
brochure (4 MB) |